Characterization of positional errors and their influence on micro four-point probe measurements on a 100 nm Ru film

Author： KjaerDaniel   HansenOle   ØsterbergFrederik Westergaard   Henrik Hartmann Henrichsen   MarkvardsenChristian   Peter Folmer Nielsen   Dirch Hjorth Petersen  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|9|95005-95011

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.9, 2015-09, pp. : 95005-95011

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