Prototype System for Plasma Film Surface Modification

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2014|223|146-152

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2014, Iss.223, 2015-02, pp. : 146-152

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract