Design Optimization of Induction Heater in Planetary Reactors for Semiconductor Industry

Publisher: Trans Tech Publications

E-ISSN: 1662-7482|2015|792|505-510

ISSN: 1660-9336

Source: Applied Mechanics and Materials, Vol.2015, Iss.792, 2015-10, pp. : 505-510

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract