Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1088|107-111

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1088, 2015-03, pp. : 107-111

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Abstract