Nanocrystalline Diamond Film Deposited by Double Bias-Voltage Assited HF-PECVD System

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1120|243-248

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1120, 2015-08, pp. : 243-248

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract