Load Support Improvement on Superhydrophobic Surface in Lubricated-MEMS Using Numerical Investigation

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1123|3-6

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1123, 2015-09, pp. : 3-6

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Abstract