Computational Results Show Gas Phase Reactions Have Great Impact on the Deposition Rate of Silicon in Siemens CVD Reactors

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1104|39-44

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1104, 2015-06, pp. : 39-44

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Abstract