Effect of RF Power on the Chemical Bonding and Humidity Sensing Properties of a-CNx Thin Films

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1107|655-660

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1107, 2015-07, pp. : 655-660

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Abstract