Fabrication of Micro-Gap Structure by Reactive Ion Etching Technique (RIE) for Future Reproductivity of Nanogap Biosensor

Publisher： Trans Tech Publications

E-ISSN： 1662-8985|2015|1109|64-68

ISSN： 1022-6680

Source： Advanced Materials Research, Vol.2015, Iss.1109, 2015-07, pp. : 64-68

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