Particle Swarm Optimization Based Technique for Deposition Parameters Optimization of Magnetron Sputtering Process

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1109|486-490

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1109, 2015-07, pp. : 486-490

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Abstract