Verification of Theoretical Model for Tunneling Currents in Al/SiO2/p-Si MOS Capacitors with Nanometer-Thick Oxides

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1112|37-40

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1112, 2015-08, pp. : 37-40

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Abstract