Fabrication of High-Aspect-Ratio Structural Change Microregions in Silicon Carbide by Femtosecond Bessel Beams

E-ISSN： 1662-8985|2015|1102|143-147

ISSN： 1022-6680

Source： Advanced Materials Research, Vol.2015, Iss.1102, 2015-06, pp. : 143-147

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