Study on Influence Laws of Surface Roughness of Micro-Groove in Single Crystal Silicon under Diamond Fly-Cutting

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|667|142-148

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.667, 2016-02, pp. : 142-148

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Abstract