Long Range Ordering of 5-nm-Sized Dot Arrays with a Pitch of <10 nm along EB-Drawn Guide Lines Using PS-PDMS Self-Assembly

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2015|643|3-7

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2015, Iss.643, 2015-06, pp. : 3-7

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