Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|645|577-582

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.645, 2015-06, pp. : 577-582

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract