Development of the Local Polishing Technique for Single-Crystal SiC Wafer

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|656|204-207

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.656, 2015-08, pp. : 204-207

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract