Study of Microhardness and Young's Modulus of Copper Thin Film by Tip-Grit AFM Scratch Technology in Various Environments

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2014|626|529-540

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2014, Iss.626, 2015-01, pp. : 529-540

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