A Double-Sided In-Plane Lateral Comb-Drive Actuator Fabricated by a Plaster-Based 3D-Printer

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2015|656|594-599

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2015, Iss.656, 2015-08, pp. : 594-599

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Abstract