Growth and microhardness of SiC films by plasma-enhanced chemical vapor deposition

By Seo J.-Y.   Yoon S.-Y.   Niihara K.   Kim K.H.  

Thin Solid Films, Vol. 406, Iss. 1, 2002-03 ,pp. : 138-144

Elsevier

Access to resources Recommend Favorite

Chemical Vapor Deposition of Boron Nitride Thin Films on SiC

By  

Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. : 990-994

Trans Tech Publications

Access to resources Recommend Favorite

Influence of Site Competition Effects on Dopant Incorporation during Chemical Vapor Deposition of 4H-SiC Epitaxial Layers

By  

Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. : 149-152

Trans Tech Publications

Access to resources Recommend Favorite

Raman and Rutherford backscattering analyses of cubic SiC thin films grown on Si by vertical chemical vapor deposition

By Feng Z.C.   Tin C.C.   Hu R.   Williams J.  

Thin Solid Films, Vol. 266, Iss. 1, 1995-09 ,pp. : 1-7

Elsevier

Access to resources Recommend Favorite

Low temperature growth of SiO 2 on SiC by plasma enhanced chemical vapor deposition for power device applications

By Mandracci P.   Ferrero S.   Ricciardi C.   Scaltrito L.   Richieri G.   Sgorlon C.  

Thin Solid Films, Vol. 427, Iss. 1, 2003-03 ,pp. : 142-146

Elsevier

Access to resources Recommend Favorite