Thin-barrier enhancement-mode AlGaN/GaN MIS-HEMT using ALD Al2O3 as gate insulator

Author: Zheli Wang   Jianjun Zhou   Yuechan Kong   Cen Kong   Xun Dong   Yang Yang   Tangsheng Chen  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.9, 2015-09, pp. : 94004-94007

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