Author: Wolter Sascha J Köntges Marc Bahnemann Detlef Brendel Rolf
Publisher: IOP Publishing
E-ISSN: 1361-6641|31|1|14007-14015
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.31, Iss.1, 2016-01, pp. : 14007-14015
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Abstract
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