Reflectance anisotropy spectroscopy as a tool for mechanical characterization of metallic thin films

Author: Wyss A   Schamel M   Sologubenko A S   Denk R   Hohage M   Zeppenfeld P   Spolenak R  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|41|415303-415313

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.41, 2015-10, pp. : 415303-415313

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Abstract