Magnetron sputtering system for coatings deposition with activation of working gas mixture by low-energy high-current electron beam

Publisher： IOP Publishing

E-ISSN： 1742-6596|652|1|132-137

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.652, Iss.1, 2015-11, pp. : 132-137

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