The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam

Publisher: IOP Publishing

E-ISSN: 1757-899X|98|1|186-190

ISSN: 1757-899X

Source: IOP Conference Series: Materials Science and Engineering, Vol.98, Iss.1, 2015-11, pp. : 186-190

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