Evaluation of the effectiveness of the use of arc plasma generator with distributed parameters for the deposition of functional coatings at low pressures.

Publisher： IOP Publishing

E-ISSN： 1742-6596|669|1|23-25

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.669, Iss.1, 2016-01, pp. : 23-25

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