Optimization of EUV Reticle Cleaning by Evaluation of Chemistries on Wafer-Based Mimic Test Structures

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2016|255|357-360

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2016, Iss.255, 2016-10, pp. : 357-360

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract