Micro-electronic devices analysis by high resolution transmission electron microscopy

Author： Gautier E.   Dashtizadeh V.   Épicier T.   Esnouf C.   Brémond G.   Plossu C.  

Publisher： Edp Sciences

E-ISSN： 1156-3141|100|5|477-494

ISSN： 0035-1563

Source： Revue de Métallurgie, Vol.100, Iss.5, 2010-03, pp. : 477-494

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