A Microbolometer System for Radiation Detection in the THz Frequency Range with a Resonating Cavity Fabricated in the CMOS Technology

Publisher： Bentham Science Publishers

E-ISSN： 2212-4020|12|1|34-44

ISSN： 1872-2105

Source： Recent Patents on Nanotechnology, Vol.12, Iss.1, 2018-02, pp. : 34-44

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