磁控共溅射制备AGZO薄膜及性能分析
Publisher： 国家哲学社会科学学术期刊数据库
E-ISSN： 2095-2945|volume|12|294-294
ISSN： 2095-2945
Source： 科技创新与应用, Vol.volume, Iss.12, 2016-01, pp. : 294-294
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Abstract