Analysis of the Flexible PDMS Capacitive Microsensor for the 3-axis Force Measurement

Publisher: Bentham Science Publishers

E-ISSN: 1876-4037|4|3|208-213

ISSN: 1876-4029

Source: Micro and Nanosystems, Vol.4, Iss.3, 2012-08, pp. : 208-213

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Abstract