温度对碳热还原/氮化法合成氮化硅的影响

Publisher: 国家哲学社会科学学术期刊数据库

E-ISSN: 1009-1742|17|1|62-66

ISSN: 1009-1742

Source: 中国工程科学, Vol.17, Iss.1, 2015-01, pp. : 62-66

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Abstract