TFT中PECVD氮化硅成膜参数对成膜速率的影响研究
Publisher： 国家哲学社会科学学术期刊数据库
E-ISSN： 2095-8374|volume|10|56-57
ISSN： 2095-8374
Source： 名城绘, Vol.volume, Iss.10, 2017-01, pp. : 56-57
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Abstract