Author: Takahashi Kazunori Komuro Atsushi Ando Akira
Publisher: IOP Publishing
E-ISSN: 1361-6595|24|5|55004-55011
ISSN: 0963-0252
Source: Plasma Sources Science and Technology, Vol.24, Iss.5, 2015-10, pp. : 55004-55011
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Abstract
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