Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists

Publisher: John Wiley & Sons Inc

E-ISSN: 1613-6829|11|45|6013-6017

ISSN: 1613-6810

Source: SMALL, Vol.11, Iss.45, 2015-12, pp. : 6013-6017

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Abstract