Monte Carlo Simulations Of Elastic Scattering With Applications To Dc And High Power Pulsed Magnetron Sputtering For Ti 3 SIC 2

Publisher： Cambridge University Press

E-ISSN： 1991-7120|11|5|1618-1642

ISSN： 1815-2406

Source： Communications in Computational Physics, Vol.11, Iss.5, 2012-05, pp. : 1618-1642

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