In Situ Topology Measurement of Micro Structured Surfaces with a Confocal Chromatic Sensor on a Desktop Sized Machine Tool

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2016|1140|392-399

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2016, Iss.1140, 2016-10, pp. : 392-399

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Abstract