Properties of nano-crystalline silicon thin film fabricated by electron beam exposure

Author： Lee Eun Hye   Lee Su Woong   Eom Young Ju   Won Hae Na   Jang Jin   Moon Byeong Yeon   Park Kyu Chang  

Publisher： Edp Sciences

E-ISSN： 1286-0050|63|2|20302-20302

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.63, Iss.2, 2013-08, pp. : 20302-20302

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