Predicting cathode material evaporation by the electric arc in PVD processes

Author: Petkov Nikolay   Bahchedzhiev Hristo   Cholakova Tetiana  

Publisher: Edp Sciences

E-ISSN: 1286-0050|70|3|30801-30801

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.70, Iss.3, 2015-06, pp. : 30801-30801

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Abstract