Influence of nitrogen impurities on the formation of active species in Ar-O2 plasmas*

Author： Guerra V.   Kutasi K.   Sá P.A.   Lino da Silva M.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|56|2|24004-24004

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.56, Iss.2, 2011-10, pp. : 24004-24004

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