Towards control of plasma-induced surface roughness: simultaneous to plasma etching deposition*

Author: Kokkoris G.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|56|2|24012-24012

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.56, Iss.2, 2011-10, pp. : 24012-24012

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Abstract