Monte Carlo study of the effective electron beam shape in scanning electron microscopic imaging

Author： Zhang Peng   Mao Shifeng   Ding Zejun  

Publisher： Edp Sciences

E-ISSN： 1286-0050|69|3|30703-30703

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.69, Iss.3, 2015-03, pp. : 30703-30703

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