DBD reactor design and optimization in continuous AP-PECVD from HMDSO/N2/N2O mixture

Author: Hotmar Petr   Caquineau Hubert   Cozzolino Raphaël   Gherardi Nicolas  

Publisher: Edp Sciences

E-ISSN: 1286-0050|73|2|20801-20801

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.73, Iss.2, 2016-02, pp. : 20801-20801

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