Tunable elastic fluidic resonant MEMS-type actuator

Author: Bardaweel Hamzeh K.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|62|3|30901-30901

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.62, Iss.3, 2013-06, pp. : 30901-30901

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Abstract