Plasma polymerization of TEOS for QCM-based VOC vapor sensing

Author： Bougharouat A.   Bellel A.   Sahli S.   Ségui Y.   Raynaud P.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|56|2|24017-24017

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.56, Iss.2, 2011-10, pp. : 24017-24017

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