Incomplete oxidation in back channel of GaInZnO thin-film transistor grown by rf sputtering

Author: Seo O.   Chung J.   Jo J.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|54|1|10302-10302

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.54, Iss.1, 2011-04, pp. : 10302-10302

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Abstract