EXCIMER-LASER-INDUCED CHEMICAL VAPOR DEPOSITION OF COPPER FILMS FROM COPPER TRIFLUOROACETYLACETONATE

E-ISSN： 1764-7177|01|C7|C7-671-C7-671

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.01, Iss.C7, 1991-12, pp. : C7-671-C7-671

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