Characterization and stressing properties of polysilicon TFTs utilizing oxide films deposited using TEOS

Publisher: Edp Sciences

E-ISSN: 1764-7177|11|PR3|Pr3-1037-Pr3-1044

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.11, Iss.PR3, 2001-08, pp. : Pr3-1037-Pr3-1044

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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