Electrical properties of ferroelectric SrBi2Ta2O9 thin films deposited on MOCVD-Pt/SiO2/Si substrates by plasma-enhanced metalorganic chemical vapor deposition

Publisher： Edp Sciences

E-ISSN： 1764-7177|08|PR9|Pr9-255-Pr9-260

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.08, Iss.PR9, 1998-12, pp. : Pr9-255-Pr9-260

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