Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance

Publisher： Edp Sciences

E-ISSN： 1764-7177|08|PR7|Pr7-265-Pr7-272

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.08, Iss.PR7, 1998-10, pp. : Pr7-265-Pr7-272

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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