Si (111) surface topography after Ar/sup +/ ion bombardment and thermal annealing

Publisher: Edp Sciences

E-ISSN: 0302-0738|48|7|1161-1170

ISSN: 0302-0738

Source: Journal de Physique, Vol.48, Iss.7, 1987-07, pp. : 1161-1170

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